Micromachined thermal conductivity sensor for the liquid phase

被引：0
|
作者：
Kuntner, J [1 ]
Kohl, F [1 ]
Jakoby, B [1 ]
机构：
[1] Vienna Univ Technol, Inst Sensor & Actuator Syst, Vienna, Austria
来源：
TRANSDUCERS '05, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2005年
关键词：
thermal sensors; thermal conductivity sensors; diffusivity sensors;
D O I：
暂无
中图分类号：
R318 [生物医学工程];
学科分类号：
0831 ;
摘要：
Due to the small thermal masses and reduced conductivities, membrane-based micromachined thermal sensors offer features superior to those provided by comparable macroscopic measurement setups. In this contribution such a device is applied to determine the thermal transport properties of various liquids. By sinusoidally exciting a heater that is placed on a membrane and recording the resulting temperature in a specified distance, both, the thermal conductivity and the diffusivity of the liquid can be determined by means of amplitude and phase measurements.
引用
收藏
页码：571 / 574
页数：4
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