Micromachined thermal conductivity sensor for the liquid phase

被引：0

作者：

Kuntner, J ^{[1
]}

Kohl, F ^{[1
]}

Jakoby, B ^{[1
]}

机构：

[1] Vienna Univ Technol, Inst Sensor & Actuator Syst, Vienna, Austria

来源：

TRANSDUCERS '05, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2005年

关键词：

thermal sensors; thermal conductivity sensors; diffusivity sensors;

D O I：

暂无

中图分类号：

R318 [生物医学工程];

学科分类号：

0831 ;

摘要：

Due to the small thermal masses and reduced conductivities, membrane-based micromachined thermal sensors offer features superior to those provided by comparable macroscopic measurement setups. In this contribution such a device is applied to determine the thermal transport properties of various liquids. By sinusoidally exciting a heater that is placed on a membrane and recording the resulting temperature in a specified distance, both, the thermal conductivity and the diffusivity of the liquid can be determined by means of amplitude and phase measurements.

引用

页码：571 / 574

页数：4

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