Micromachined thermal conductivity sensor for the liquid phase

被引：0
|
作者：
Kuntner, J [1 ]
Kohl, F [1 ]
Jakoby, B [1 ]
机构：
[1] Vienna Univ Technol, Inst Sensor & Actuator Syst, Vienna, Austria
来源：
TRANSDUCERS '05, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2005年
关键词：
thermal sensors; thermal conductivity sensors; diffusivity sensors;
D O I：
暂无
中图分类号：
R318 [生物医学工程];
学科分类号：
0831 ;
摘要：
Due to the small thermal masses and reduced conductivities, membrane-based micromachined thermal sensors offer features superior to those provided by comparable macroscopic measurement setups. In this contribution such a device is applied to determine the thermal transport properties of various liquids. By sinusoidally exciting a heater that is placed on a membrane and recording the resulting temperature in a specified distance, both, the thermal conductivity and the diffusivity of the liquid can be determined by means of amplitude and phase measurements.
引用
收藏
页码：571 / 574
页数：4
相关论文
共 50 条
  • [1] Thermal and gas-sensing properties of a micromachined thermal conductivity sensor
    Simon, I
    Arndt, M
    TRANSDUCERS '01: EUROSENSORS XV, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2001, : 1492 - 1495
  • [2] NUMERICAL MODELING OF A MICROMACHINED THERMAL-CONDUCTIVITY GAS-PRESSURE SENSOR
    ALLEGRETTO, W
    SHEN, B
    HASWELL, P
    LAI, ZS
    ROBINSON, AM
    IEEE TRANSACTIONS ON COMPUTER-AIDED DESIGN OF INTEGRATED CIRCUITS AND SYSTEMS, 1994, 13 (10) : 1247 - 1256
  • [3] Thermal conductivity determination of micromachined membranes
    Sabaté, N
    Santander, J
    Gràcia, I
    Fonseca, L
    Cabruja, E
    Cané, C
    2005 SPANISH CONFERENCE ON ELECTRON DEVICES, PROCEEDINGS, 2005, : 229 - 232
  • [4] Thermal and gas-sensing properties of a micromachined thermal conductivity sensor for the detection of hydrogen in automotive applications
    Simon, I
    Arndt, M
    SENSORS AND ACTUATORS A-PHYSICAL, 2002, 97-8 : 104 - 108
  • [5] Thermal conductivity of propane and butane in the liquid phase
    Yata, J
    Hori, M
    Hagiwara, T
    Minamiyama, T
    FLUID PHASE EQUILIBRIA, 1996, 125 (1-2) : 267 - 274
  • [6] THERMAL CONDUCTIVITY OF BISMUTH SELENIDE IN LIQUID PHASE
    FEDOROV, VI
    OKHOTIN, AS
    GLAZOV, VM
    HIGH TEMPERATURE, 1968, 6 (02) : 244 - &
  • [7] Thermal conductivity of isobutane and propylene in the liquid phase
    Yata, J
    Hori, M
    Isono, Y
    Ueda, Y
    THERMAL CONDUCTIVITY 25: THERMAL EXPANSION 13, 2000, 25 : 325 - 332
  • [8] The thermal conductivity of dimethyl carbonate in the liquid phase
    Jin, XG
    Wu, JT
    Liu, ZG
    Pan, J
    FLUID PHASE EQUILIBRIA, 2004, 220 (01) : 37 - 40
  • [9] Thermal conductivity of alternative refrigerants in the liquid phase
    Yata, J
    Hori, M
    Kobayashi, K
    Minamiyama, T
    INTERNATIONAL JOURNAL OF THERMOPHYSICS, 1996, 17 (03) : 561 - 571
  • [10] Thermal conductivity of diethyl carbonate in liquid phase
    Song, Lin-Feng
    Wu, Jiang-Tao
    Liu, Zhi-Gang
    Gao Xiao Hua Xue Gong Cheng Xue Bao/Journal of Chemical Engineering of Chinese Universities, 2008, 22 (02): : 183 - 187
12345