On the Linearity of BST Thin Film Bulk Acoustic Resonators

被引：0
|
作者：
Koohi, Milad Zolfagharloo [1 ]
Mortazawi, Amir [1 ]
机构：
[1] Univ Michigan, Elect Engn & Comp Sci, Ann Arbor, MI 48109 USA
来源：
2018 IEEE MTT-S INTERNATIONAL MICROWAVE WORKSHOP SERIES ON ADVANCED MATERIALS AND PROCESSES FOR RF AND THZ APPLICATIONS (IMWS-AMP) | 2018年
基金：
美国国家科学基金会;
关键词：
Barium strontium titanate (BST); ferroelectrics; film bulk acoustic resonator (FBAR); Linearity; reconfigurable systems; switchable;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Preliminary measurement results on the linearity of intrinsically switchable BST thin film bulk acoustic resonators (FBARs) are presented. Ferroelectric BST possesses electric-field-piezoelectricity, or electrostriction, which is employed to design intrinsically switchable BST FBARs. The linearity of these switchable resonators is an important factor for designing intrinsically switchable filters. The linearity of a single resonator is compared with two cascaded doubled size BST resonators. Third-order intercept point (IP3) measurement is performed, demonstrating the input IP3 improvement from 39 dBm to 43 dBm.
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页数：3
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