Fabrication of ZnO micro-fluidic channels by ZnO sol-gel/PMMA bilayer structure

被引：0
|
作者：
Lee, J. C. [1 ]
Leu, I. C. [2 ]
Hon, M. H. [1 ]
机构：
[1] Natl Cheng Kung Univ, Dept Mat Sci & Engn, Tainan 701, Taiwan
[2] Natl United Univ, Dept Mat Sci & Engn, Miaoli 360, Taiwan
来源：
MICROPROCESSES AND NANOTECHNOLOGY 2007, DIGEST OF PAPERS | 2007年
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D O I：
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
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页码：324 / +
页数：2
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