Optical constants of diamond-like carbon films formed by gas cluster ion beam assisted deposition

被引：3
|
作者：
Miyamoto, Reimi [1 ]
Nishiyama, Akio [2 ]
Yoshikawa, Ryota [2 ]
Taguchi, Junji [2 ]
Komatsu, Keiji [1 ]
Saitoh, Hidetoshi [1 ]
机构：
[1] Nagaoka Univ Technol, 1603-1 Kamitomiokamachi, Nagaoka, Niigata 9402188, Japan
[2] Nomura Plating Co Ltd, 5-12-20 Himejima, Nishiyodogawa, Osaka 5550033, Japan
来源：
APPLIED PHYSICS EXPRESS | 2022年 / 15卷 / 03期
关键词：
Diamond-like carbon; Ion beam-assisted deposition; Spectroscopic ellipsometry; Raman spectroscopy; X-ray refractivity; DLC FILMS;
D O I：
10.35848/1882-0786/ac4e28
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We investigated the refractive index (n) and extinction coefficient (k) of diamond-like carbon (DLC) films formed by gas cluster ion beam (GCIB)-assisted deposition. DLC films are classified into four types based on n and k values (at lambda = 2.25 eV). We formed the nonclassified DLC film which has high n (2.4-3.0) and k (0.75-1.0) values. The Raman peak intensity ratio (I (D)/I (G)) of this film was 0.601, which corresponds to the value of a-C:H or ta-C:H. The film density was 2.71 g cm(-3). The nonclassified DLC film has intermediate properties between a-C:H and ta-C:H with respect to the density and k.
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页数：5
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