Optical constants of diamond-like carbon films formed by gas cluster ion beam assisted deposition

被引：3

作者：

Miyamoto, Reimi ^{[1
]}

Nishiyama, Akio ^{[2
]}

Yoshikawa, Ryota ^{[2
]}

Taguchi, Junji ^{[2
]}

Komatsu, Keiji ^{[1
]}

Saitoh, Hidetoshi ^{[1
]}

机构：

[1] Nagaoka Univ Technol, 1603-1 Kamitomiokamachi, Nagaoka, Niigata 9402188, Japan

[2] Nomura Plating Co Ltd, 5-12-20 Himejima, Nishiyodogawa, Osaka 5550033, Japan

来源：

APPLIED PHYSICS EXPRESS | 2022年 / 15卷 / 03期

关键词：

Diamond-like carbon; Ion beam-assisted deposition; Spectroscopic ellipsometry; Raman spectroscopy; X-ray refractivity; DLC FILMS;

D O I：

10.35848/1882-0786/ac4e28

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We investigated the refractive index (n) and extinction coefficient (k) of diamond-like carbon (DLC) films formed by gas cluster ion beam (GCIB)-assisted deposition. DLC films are classified into four types based on n and k values (at lambda = 2.25 eV). We formed the nonclassified DLC film which has high n (2.4-3.0) and k (0.75-1.0) values. The Raman peak intensity ratio (I (D)/I (G)) of this film was 0.601, which corresponds to the value of a-C:H or ta-C:H. The film density was 2.71 g cm(-3). The nonclassified DLC film has intermediate properties between a-C:H and ta-C:H with respect to the density and k.

引用

页数：5

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