X-ray photoelectron spectroscopy study of diamond-like carbon thin films formed by Ar gas cluster ion beam-assisted fullerene deposition

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作者：
Haruyama, Yuichi [1 ,2 ]
Kitagawa, Teruyuki [3 ]
Kanda, Kazuhiro [1 ,2 ]
Matsui, Shinji [1 ,2 ]
Gejo, Tatsuo [1 ]
Toyoda, Noriaki [4 ]
Yamada, Isao [4 ]
机构：
[1] Graduate School of Science, University of Hyogo, 3-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, Japan
[2] Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, Japan
[3] Nomura Plating Co. Ltd., Nishiyodogawa, Osaka 555-0033, Japan
[4] Graduate School of Engineering, University of Hyogo, 2167 Syosya, Himeji, Hyogo 671-2201, Japan
来源：
Japanese Journal of Applied Physics | 2008年 / 47卷 / 5 PART 1期
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Journal article (JA)
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页码：3380 / 3383
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