Nanoindentation study on mechanical properties of Zr(C)N films deposited on NiTi shape memory alloy

被引：0
|
作者：
Chu, C. L. [1 ,2 ]
Ji, H. L. [1 ,2 ]
Guo, C. [1 ,2 ]
Sheng, X. B. [1 ]
Dong, Y. S. [1 ,2 ]
Lin, P. H. [1 ,2 ]
Hu, T. [3 ]
Chu, P. K. [3 ]
机构：
[1] Southeast Univ, Sch Mat Sci & Engn, Nanjing 211189, Peoples R China
[2] Southeast Univ, Jiangsu Key Lab Adv Metall Mat, Nanjing 211189, Peoples R China
[3] City Univ Hong Kong, Dept Phys & Mat Sci, Kowloon, Hong Kong, Peoples R China
来源：
INEC: 2010 3RD INTERNATIONAL NANOELECTRONICS CONFERENCE, VOLS 1 AND 2 | 2010年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Surface nanomechanical properties of ZrN and ZrCN films deposited on NiTi shape memory alloy (SMA) by magnetron sputtering were investigated by nanoindentation study. And their surface deformation mechanism under nanoindentation load was also proposed and discussed by comparison with that of the electropolished NiTi SMA.
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页码：985 / +
页数：2
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