Structure and performance of NiTi shape memory alloy thin films sputter-deposited by situ heating

被引：0
|
作者：
Yuan Zhenyu [1 ]
Xu Dong [1 ]
Liu Yushu [1 ]
Cai Bingchu [1 ]
机构：
[1] Shanghai Jiao Tong Univ, Res Inst Micro & Nano Sci & Technol, Minist Educ, Key Lab Thin Film & Microfabricat, Shanghai 200030, Peoples R China
来源：
RARE METAL MATERIALS AND ENGINEERING | 2006年 / 35卷 / 11期
关键词：
NiTi shape memory alloy thin films; in situ heating; texture; micro-actuator;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Structure of NiTi shape memory alloy (SMA) thin films prepared by sputtering in situ heating was studied. The process of fabrication and the texture affecting properties and transformation characteristics of thin films were investigated, and the sputtering process suited for micro-device was optimized. The results show that the crystallized NiTi thin films with a strong texture of A (110) can be prepared with sputter-deposited in situ heating, and with rising of sputtering power, the A -> M transformation temperature also increases.
引用
收藏
页码：1800 / 1802
页数：3
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