Robust H∞ control in nano-positioning

被引:0
|
作者
Chunag, Ning [1 ]
Petersen, Ian R. [1 ]
机构
[1] Univ New S Wales, Sch Engn & Informat Technol, Australian Def Force Acad, Canberra, ACT 2600, Australia
关键词
HYSTERESIS; COMPENSATION; SYSTEMS; DESIGN; CREEP;
D O I
暂无
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
This paper considers the use of robust H-infinity tracking control in a nano-positioning system. The design of the controller takes into account of the existence of hysteresis in the piezoelectric actuator. Parameters in a nonlinear model of the system are obtained from experimental measurements. Experimental results show that the robust H-infinity controller yields accurate tracking of displacement and also significantly reduces the hysteresis.
引用
收藏
页码:2237 / 2244
页数:8
相关论文
共 50 条
  • [31] A nano-positioning system for macromolecular structural analysis
    Adam Muschielok
    Joanna Andrecka
    Anass Jawhari
    Florian Brückner
    Patrick Cramer
    Jens Michaelis
    Nature Methods, 2008, 5 : 965 - 971
  • [32] Adaptive robust control strategy for coupled parallel-kinematics piezo-flexural micro and nano-positioning stages
    Bashash, Saeid
    Jalili, Nader
    PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINERING CONGRESS AND EXPOSITION 2007, VOL 9, PTS A-C: MECHANICAL SYSTEMS AND CONTROL, 2008, : 997 - 1006
  • [33] Modal actuation for high bandwidth nano-positioning
    van Hulzen, J. R.
    Schitter, G.
    van den Hof, P. M. J.
    van Eijk, J.
    2010 AMERICAN CONTROL CONFERENCE, 2010, : 6525 - 6530
  • [34] Development of a novel multi-axis nano-positioning and the spiral tracking control
    Jywe, Wen-Yuh
    Jeng, Yeau-Ren
    Shen, Jing-Chung
    Liu, Chien-Hung
    Teng, Yun-Feng
    Jian, Yu-Te
    Wang, Hung-Shu
    JOURNAL OF THE CHINESE SOCIETY OF MECHANICAL ENGINEERS, 2009, 30 (04): : 343 - 350
  • [35] One-dimensional nano-positioning stage
    Dai, Rong
    Xie, Tiebang
    Chang, Suping
    Zhongguo Jixie Gongcheng/China Mechanical Engineering, 2006, 17 (02): : 115 - 118
  • [36] The Design of Kalman Filter for Nano-Positioning Stage
    Dai, Jing
    Qu, Peng
    Shao, Meng
    Zhang, Hui
    Mao, Yongming
    HARMONY SEARCH ALGORITHM, 2016, 382 : 69 - 75
  • [37] Strategy for the control of a dual-stage nano-positioning system with a single metrology
    Michellod, Yvan
    Mullhaupt, Philippe
    Gillet, Denis
    2006 IEEE CONFERENCE ON ROBOTICS, AUTOMATION AND MECHATRONICS, VOLS 1 AND 2, 2006, : 250 - +
  • [38] A Fast Approaching Control Method for Nano-Positioning Systems with Switched PID Controller
    Jiang, Xinxiang
    Cao, Ning
    Wu, Zhizheng
    Zhang, Zhu
    Liu, Mei
    Xie, Shaorong
    2017 IEEE 2ND ADVANCED INFORMATION TECHNOLOGY, ELECTRONIC AND AUTOMATION CONTROL CONFERENCE (IAEAC), 2017, : 1514 - 1518
  • [39] Design and Control of a Normal-Stressed Electromagnetic Actuated Nano-positioning Stage
    Wang, Xiangyuan
    Li, Linlin
    Huang, Wei-Wei
    Zhu, LiMin
    INTELLIGENT ROBOTICS AND APPLICATIONS, ICIRA 2021, PT II, 2021, 13014 : 324 - 334
  • [40] A robust rotation-invariance displacement measurement method for a micro-/nano-positioning system
    Zhang, Xiang
    Zhang, Xianmin
    Wu, Heng
    Li, Hai
    Gan, Jinqiang
    MEASUREMENT SCIENCE AND TECHNOLOGY, 2018, 29 (05)