Robust H∞ control in nano-positioning

被引:0
|
作者
Chunag, Ning [1 ]
Petersen, Ian R. [1 ]
机构
[1] Univ New S Wales, Sch Engn & Informat Technol, Australian Def Force Acad, Canberra, ACT 2600, Australia
关键词
HYSTERESIS; COMPENSATION; SYSTEMS; DESIGN; CREEP;
D O I
暂无
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
This paper considers the use of robust H-infinity tracking control in a nano-positioning system. The design of the controller takes into account of the existence of hysteresis in the piezoelectric actuator. Parameters in a nonlinear model of the system are obtained from experimental measurements. Experimental results show that the robust H-infinity controller yields accurate tracking of displacement and also significantly reduces the hysteresis.
引用
收藏
页码:2237 / 2244
页数:8
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