Computational lithography for nanostructure science and technology

被引：0
|
作者：
Peckerar, Martin [1 ]
Sander, David [1 ]
Srivastava, Ankur [1 ]
Foli, Adakou [1 ]
机构：
[1] Univ Maryland, Dept Elect & Comp Engn, College Pk, MD 20742 USA
来源：
2007 INTERNATIONAL SEMICONDUCTOR DEVICE RESEARCH SYMPOSIUM, VOLS 1 AND 2 | 2007年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：369 / 370
页数：2
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