Interferometric measurement of surface shape by wavelength tuning suppressing random intensity error

被引：6
|
作者：
Kim, Yangjin [1 ]
Hibino, Kenichi [2 ]
Sugita, Naohiko [1 ]
Mitsuishi, Mamoru [1 ]
机构：
[1] Univ Tokyo, Dept Mech Engn, Bunkyo Ku, 7-3-1 Hongo, Tokyo 1138656, Japan
[2] Natl Inst Adv Ind Sci & Technol, 1-1-1 Umezono, Tsukuba, Ibaraki 3058563, Japan
来源：
APPLIED OPTICS | 2016年 / 55卷 / 23期
关键词：
PHASE-SHIFTING INTERFEROMETRY; COMPENSATING ALGORITHMS; OPTICAL-THICKNESS; DESIGN; DERIVATION; WAFER; NOISE;
D O I：
10.1364/AO.55.006464
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
In this research, the susceptibility of the phase-shifting algorithms to the random intensity error is formulated and estimated. The susceptibility of the random intensity error of conventional windowed phase-shifting algorithms is discussed, and the 7N - 6 phase-shifting algorithm is developed to minimize the random intensity error using the characteristic polynomial theory. Finally, the surface shape of the transparent wedge plate is measured using a wavelength-tuning Fizeau interferometer and the 7N - 6 algorithm. The experimental results indicate that the surface shape measurement accuracy for the transparent plate is 2.5 nm. (C) 2016 Optical Society of America.
引用
收藏
页码：6464 / 6470
页数：7
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