AlN MEMS Resonator with High Quality Factor

被引：0
|
作者：
Liu, Wenli [1 ,2 ,3 ]
Li, Jinchao [1 ,2 ,3 ]
Chen, Zeji [1 ,2 ,3 ]
Zhu, Yinfang [1 ,2 ,3 ]
Yang, Jinling [1 ,2 ,3 ]
Yang, Fuhua [1 ,2 ]
机构：
[1] Chinese Acad Sci, Inst Semicond, Beijing, Peoples R China
[2] Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing, Peoples R China
[3] State Key Lab Transducer Technol, Shanghai, Peoples R China
来源：
2021 JOINT CONFERENCE OF THE EUROPEAN FREQUENCY AND TIME FORUM AND IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM (IEEE EFTF-IFCS 2021) | 2021年
基金：
中国国家自然科学基金;
关键词：
MEMS; AlN resonator; quality factor; notched support; PML;
D O I：
暂无
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
This paper reports a novel design on the notched supports coupled to the end of tethers to enhance the quality factor (Q factor) of the Lamb wave Aluminum Nitride (AlN) microelectro-mechanical systems (MEMS) resonators. The anchor loss was reduced with the optimal notched support. Compared with the conventional flat-edge resonators, the Q factors of the fabricated resonators were improved by 1.42 times and 1.20 times at frequencies of 664 MHz and 839 MHz, respectively. This proposed approach can be adapted to various piezoelectric resonators which suffered from severe anchor loss induced by conventional tether designs.
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页数：4
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