Navigating yield through the maze of copper CMP defects

被引：0
|
作者：
Guha, S [1 ]
Sethuraman, A
Gotkis, Y
Kistler, R
Steckenrider, S
机构：
[1] KLA Tencor Corp, San Jose, CA 95134 USA
[2] Lam Res Corp, Fremont, CA USA
[3] Cabot Corp, Aurora, IL USA
来源：
SOLID STATE TECHNOLOGY | 2001年 / 44卷 / 04期
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Many types of defects arise from the copper CMP step, and careful inspection and an understanding of the failure mechanisms allow processes to be modified to reduce the defect levels. Some of the defects that appear at copper CMP actually come from previous process steps, so the right inspection and analysis approach can improve entire process modules.
引用
收藏
页码：63 / +
页数：5
相关论文
共 50 条
  • [21] Navigating the cancer maze
    Hand, L
    SCIENTIST, 2002, 16 (11): : 10 - 10
  • [22] Navigating the internet maze
    Singer, KP
    Tan, BK
    MANUAL THERAPY, 2000, 5 (03) : 165 - 172
  • [23] NAVIGATING THE MONITOR MAZE
    ABATEMARCO, F
    PERSONAL COMPUTING, 1988, 12 (05): : 5 - 5
  • [24] Navigating the HIPAA maze
    Isaacs, Lindsay
    American City and County, 2002, 117 (13):
  • [25] Elimination the CMP Defects for TSV Process by Optimizing the Copper Electrodeposition
    Jiang, Chuang
    Li, Ming
    Wang, Su
    Li, Yanyan
    Yu, Xianxian
    2017 18TH INTERNATIONAL CONFERENCE ON ELECTRONIC PACKAGING TECHNOLOGY (ICEPT), 2017, : 1147 - 1151
  • [26] Yield improvement through implementation of edge scrub at post oxide dielectric CMP on 0.13 μm copper technology
    Carey, T
    Lorenz, M
    Dougan, J
    2003 IEEE INTERNATIONAL SYMPOSIUM ON SEMICONDUCTOR MANUFACTURING, CONFERENCE PROCEEDINGS, 2003, : 404 - 407
  • [27] Navigating the Maze of Music Rights
    DuBoff, Leonard D.
    TECHTRENDS, 2007, 51 (03) : 10 - 10
  • [28] Navigating the maze of newborn screening
    Spahis, Joanna K.
    Bowers, Nancy R.
    MCN-THE AMERICAN JOURNAL OF MATERNAL-CHILD NURSING, 2006, 31 (03) : 190 - 196
  • [29] Navigating the tolerance analysis maze
    Arizona State University, Tempe
    不详
    Comput.-Aided Des. Appl., 2007, 1-6 (705-718):
  • [30] Statin myopathy: navigating the maze
    Rizos, Christos V.
    Elisaf, Moses S.
    CURRENT MEDICAL RESEARCH AND OPINION, 2017, 33 (02) : 327 - 329
12345