Design and fabrication of low voltage integrated electrophoresis chip

Low voltage microchip electrophoresis provides a good approach to figure out the problems in the microfluidic analytical system, such as high separation voltage, integration difficulty and application limitation, etc. According to low voltage Moving Gradient Electric Field Electrophoresis separation principle, the practical models of electric and fluidic field on microchip were established to simulate the separation voltage, structure of arrayed-electrodes and microchannel and so on. The design parameters of low voltage electrophoresis chip were discussed in details for chip design in this paper. Finally, designed microchip was fabricated successfully based on Silicon-on-insulator - Micro Electronic Mechnical System (SOI-MEMS) technique.