Dynamic geometric compensation for gantry stage using iterative learning control

被引：18

作者：

Teo, Chek-Sing ^{[1
]}

Tan, Kok-Kiong ^{[1
]}

Lim, Ser-Yong ^{[1
]}

机构：

[1] Natl Univ Singapore, Dept Elect & Comp Engn, Singapore 117576, Singapore

来源：

IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT | 2008年 / 57卷 / 02期

关键词：

dual-axis encoder; dynamic compensation; gantry stage; iterative learning control (ILC); permanent-magnet linear motors (PMLMs);

D O I：

10.1109/TIM.2007.910103

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, iterative learning control is used in a gantry stage to compensate for dynamic errors, hence improving the tracking accuracy of the system by using a dual-axis high-grade analog optical encoder as a reference in calibrating and modeling dynamical geometric errors. This proposed approach is able to compensate the errors for a given trajectory set. Experimental and simulation results are provided to highlight the principles and practical applicability of the proposed method that results from such an approach.

引用

页码：413 / 419

页数：7

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