Dynamic geometric compensation for gantry stage using iterative learning control

被引：18
|
作者：
Teo, Chek-Sing [1 ]
Tan, Kok-Kiong [1 ]
Lim, Ser-Yong [1 ]
机构：
[1] Natl Univ Singapore, Dept Elect & Comp Engn, Singapore 117576, Singapore
来源：
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT | 2008年 / 57卷 / 02期
关键词：
dual-axis encoder; dynamic compensation; gantry stage; iterative learning control (ILC); permanent-magnet linear motors (PMLMs);
D O I：
10.1109/TIM.2007.910103
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, iterative learning control is used in a gantry stage to compensate for dynamic errors, hence improving the tracking accuracy of the system by using a dual-axis high-grade analog optical encoder as a reference in calibrating and modeling dynamical geometric errors. This proposed approach is able to compensate the errors for a given trajectory set. Experimental and simulation results are provided to highlight the principles and practical applicability of the proposed method that results from such an approach.
引用
收藏
页码：413 / 419
页数：7
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