Suppression of boron-oxygen defects in p-type Czochralski silicon by germanium doping (vol 97, 051903, 2010)

被引:0
|
作者
Yu, Xuegong [1 ]
Wang, Peng [1 ]
Chen, Peng [1 ]
Li, Xiaoqiang [1 ]
Yanga, Deren [1 ]
机构
[1] Zhejiang Univ, State Key Lab Silicon Mat, Hangzhou 310027, Zhejiang, Peoples R China
关键词
D O I
10.1063/1.3483301
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页数:1
相关论文
共 50 条
  • [21] The Nature of Lifetime-Degrading Boron-Oxygen Centres Revealed by Comparison of p-type and n-type Silicon
    Voronkov, V. V.
    Falster, R.
    Bothe, K.
    Lim, B.
    Schmidt, J.
    GETTERING AND DEFECT ENGINEERING IN SEMICONDUCTOR TECHNOLOGY XIV, 2011, 178-179 : 139 - +
  • [22] Effect of germanium doping on the annealing characteristics of oxygen and carbon-related defects in Czochralski silicon
    Londos, C. A.
    Andrianakis, A.
    Sgourou, E. N.
    Emtsev, V.
    Ohyama, H.
    JOURNAL OF APPLIED PHYSICS, 2010, 107 (09)
  • [23] Kinetics and dynamics of the regeneration of boron-oxygen defects in compensated n-type silicon
    Sun, Chang
    Chen, Daniel
    Rougieux, Fiacre
    Basnet, Rabin
    Hallam, Brett
    Macdonald, Daniel
    SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2019, 195 : 174 - 181
  • [24] Enhanced oxygen diffusion in highly doped p-type Czochralski silicon
    Murphy, J. D.
    Wilshaw, P. R.
    Pygall, B. C.
    Senkader, S.
    Falster, R. J.
    JOURNAL OF APPLIED PHYSICS, 2006, 100 (10)
  • [25] Generation kinetics of boron-oxygen complexes in p-type compensated c-Si
    Wu, Yichao
    Yu, Xuegong
    Chen, Peng
    Chen, Xianzi
    Yang, Deren
    APPLIED PHYSICS LETTERS, 2014, 104 (10)
  • [26] Defects in carbon and oxygen implanted p-type silicon
    Pivac, B
    Kovacevic, I
    Borjanovic, V
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2002, 186 : 355 - 359
  • [27] Impact of germanium co-doping on oxygen precipitation in heavily boron-doped Czochralski silicon
    Zhao, Jian
    Dong, Peng
    Zhao, Jianjiang
    Ma, Xiangyang
    Yang, Deren
    SUPERLATTICES AND MICROSTRUCTURES, 2016, 99 : 35 - 40
  • [28] The Boron-Oxygen (BiOi) Defect Complex Induced by Irradiation With 23 GeV Protons in p-Type Epitaxial Silicon Diodes
    Liao, C.
    Fretwurst, E.
    Garutti, E.
    Schwandt, J.
    Moll, M.
    Himmerlich, A.
    Gurimskaya, Y.
    Pintilie, I
    Nitescu, A.
    Li, Z.
    Makarenko, L.
    IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 2022, 69 (03) : 576 - 586
  • [29] Electrical characteristic of oxygen-related donors in p-type czochralski silicon
    Yu, Xuegong
    Yang, Deren
    Ma, Xiangyang
    Tang, Yan
    Li, Dongsheng
    Li, Liben
    Que, Duanlin
    Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors, 2002, 23 (04): : 377 - 381
  • [30] DEFECTS STATES IN CARBON AND OXYGEN IMPLANTED P-TYPE SILICON
    AWADELKARIM, OO
    SULIMAN, SA
    MONEMAR, B
    LINDSTROM, JL
    ZHANG, Y
    CORBETT, JW
    JOURNAL OF APPLIED PHYSICS, 1990, 67 (01) : 270 - 275