Negative bias illumination stress instability in amorphous InGaZnO thin film transistors with transparent source and drain

被引:1
|
作者
Lee, Jong Hoon [1 ]
Yu, Seul Ki [1 ]
Kim, Jae Won [1 ]
Ahn, Min-Ju [2 ]
Cho, Won-Ju [2 ]
Park, Jong Tae [1 ]
机构
[1] Incheon Natl Univ, Dept Elect Engn, Inchon 406772, South Korea
[2] Kwangwoon Univ, Dept Elect Mat Engn, Seoul 139701, South Korea
基金
新加坡国家研究基金会;
关键词
InGaZnO thin film transistors; Transparent source and drain; Negative bias illumination stress instability;
D O I
10.1016/j.microrel.2016.07.036
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The investigations on the device instabilities in amorphous InGaZnO TFTs with metal (Ni) and transparent (ITO and InGaZnO) source and drain electrodes have been performed under negative bias stress (NBS), negative bias thermal stress (NBTS), negative bias illumination stress (NBIS) and negative bias thermal and illumination stress (NBTIS). From the measured device parameters in dark and under illumination conditions, a-IGZO TFTs with InGaZnO source and drain show an excellent device performances and lower device degradation than the devices with Ni and ITO source and drain under NBS and NBTS. However, amorphous IGZO TFTs with InGaZnO source and drain electrodes show more significant device degradation under NBIS and NBTIS. In order to explain our experimental results, we propose that the center responsible for the device instability is the process-related defects under NBS and NBTS, and the oxygen vacancy under NBIS and NBTIS, respectively. (C) 2016 Elsevier Ltd. All rights reserved.
引用
收藏
页码:580 / 584
页数:5
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