共 50 条
- [32] DRY DEVELOPMENT OF ION-BEAM EXPOSED PMMA RESIST JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 21 (02): : 666 - 671
- [33] Optical property modification of ruby and sapphire by N-ion implantation SURFACE & COATINGS TECHNOLOGY, 2005, 196 (1-3): : 108 - 112
- [34] STUDIES ON SURFACE MODIFICATION OF METALS BY ION-BEAM MIXING IMPLANTING WITH PLASMA SOURCE ION-IMPLANTATION CHINESE SCIENCE BULLETIN, 1994, 39 (14): : 1161 - 1165
- [35] FOCUSED ION-BEAM GALLIUM IMPLANTATION INTO SILICON APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1986, 39 (03): : 183 - 190
- [36] NANOSTRUCTURES PROCESSING BY FOCUSED ION-BEAM IMPLANTATION JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (06): : 3074 - 3078
- [38] LARGE DIAMETER ION-BEAM IMPLANTATION SYSTEM NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 21 (2-4): : 314 - 316
- [39] FOCUSED PHOSPHORUS ION-BEAM IMPLANTATION INTO SILICON NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 39 (1-4): : 511 - 514
- [40] ALIGNMENT ACCURACY OF FOCUSED ION-BEAM IMPLANTATION JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1987, 26 (06): : 955 - 958