Nanoscale dot Patterning by anodic oxidation with atomic force microscope

被引：0
|
作者：
Sramala, I. [1 ]
Jafferi, T. [1 ]
Trithong, A. [1 ]
Klameheun, A. [1 ]
Pratontep, S. [1 ]
机构：
[1] NSTDA, Natl Nanotechnol Ctr, 111 Thailand Sci Pk,Paholyothin Rd, Pathum Thani 12120, Thailand
来源：
2007 2ND IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1-3 | 2007年
关键词：
atomic force microscopy; oxidation; lithography;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：749 / +
页数：2
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