A novel atomic force microscopy based lithography system for automated patterning via anodic oxidation

被引：0
|
作者：
Gan, Y. J. [1 ]
Wong, H. Y. [1 ]
Lee, W. P. [1 ]
机构：
[1] Multimedia Univ, Fac Engn, Cyberjaya 63100, Selangor, Malaysia
来源：
COMPOSITES PART B-ENGINEERING | 2011年 / 42卷 / 03期
关键词：
Microstructures; Automation; Atomic force microscopy; SILICON; PROBE;
D O I：
10.1016/j.compositesb.2010.12.007
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
An Atomic force microscopy (AFM) based lithography system is successfully designed and constructed for automated patterning through local anodic oxidation. We present the detailed design of this system, where a novel technique is introduced by utilizing a motorized high precision XY stages to provide precise pattern movements while the AFM tip remains stationery. Several in-house hardware such as source measure unit and microscope imaging camera are integrated and controlled by a software tool. Numerous oxide structures are successfully created to demonstrate the ability of this low cost and accurate system, including a 30 pm long cantilever. (c) 2010 Elsevier Ltd. All rights reserved.
引用
收藏
页码：456 / 461
页数：6
相关论文
共 50 条
  • [1] Anodic oxidation lithography via atomic force microscope on organic resist layers
    Kim, Sung-Kyoung
    Lee, Haiwon
    [J]. POLYMER-KOREA, 2006, 30 (03) : 187 - 195
  • [2] Atomic Force Microscopy Based Tunable Local Anodic Oxidation of Graphene
    Masubuchi, Satoru
    Arai, Miho
    Machida, Tomolci
    [J]. NANO LETTERS, 2011, 11 (11) : 4542 - 4546
  • [3] Nanoscale dot Patterning by anodic oxidation with atomic force microscope
    Sramala, I.
    Jafferi, T.
    Trithong, A.
    Klameheun, A.
    Pratontep, S.
    [J]. 2007 2ND IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1-3, 2007, : 749 - +
  • [4] Patterning at the nanoscale: Atomic force microscopy and extreme ultraviolet interference lithography
    Parisse, P.
    Luciani, D.
    D'Angelo, A.
    Santucci, S.
    Zuppella, P.
    Tucceri, P.
    Reale, A.
    Ottaviano, L.
    [J]. MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS, 2009, 165 (03): : 227 - 230
  • [5] Atomic force microscope anodic oxidation studied by spectroscopic microscopy
    Lazzarino, M
    Heun, S
    Ressel, B
    Prince, KC
    Pingue, P
    Ascoli, C
    [J]. APPLIED PHYSICS LETTERS, 2002, 81 (15) : 2842 - 2844
  • [6] Fabrication of 10-nm-scale nanoconstrictions in graphene using atomic force microscopy-based local anodic oxidation lithography
    Arai, Miho
    Masubuchi, Satoru
    Nose, Kenji
    Mitsuda, Yoshitaka
    Machida, Tomoki
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 2015, 54 (04)
  • [7] Design And Construction Of Atomic Force Microscopy System For Nanostructure Patterning
    Gan, Y. J.
    Lee, W. P.
    Wong, H. Y.
    [J]. NANOSCIENCE AND NANOTECHNOLOGY, 2009, 1136 : 76 - 78
  • [8] Atomic force microscopy-based nano-lithography for nano-patterning: a molecular dynamic study
    Kim, YS
    Na, KH
    Choi, SO
    Yang, SH
    [J]. JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 2004, 155 : 1847 - 1854
  • [9] Patterning surface oxide nanostructures using atomic force microscope local anodic oxidation
    Kim, Tae Young
    Di Zitti, Ermanno
    Ricci, Davide
    Cincotti, Silvano
    [J]. PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES, 2008, 40 (06): : 1941 - 1943
  • [10] Fabrication of graphene nanoribbon by local anodic oxidation lithography using atomic force microscope
    Masubuchi, S.
    Ono, M.
    Yoshida, K.
    Hirakawa, K.
    Machida, T.
    [J]. APPLIED PHYSICS LETTERS, 2009, 94 (08)
12345