Microfabricated near-field microwave probes for scanning microscopy

The design and microfabrication of a silicon co-axial scanning near-field microwave probe (SNMP) compatible with atomic force microscope (AFM) system are reported. Scanning near-field microwave microscopy (SNMM) imaging is suitable for nondestructive surface and subsurface characterization of materials over a wide frequency range-between 0.1 GHz and 300 GHz, which bridges the frequency gap among other scanning local probe microscopy (SLPM) methods. The microfabricated SNMP consists of a silicon (Si) V-shaped cantilever beam, a co-axial tip, and aluminum waveguides. The design and microfabrication procedure are described. Mechanical and electrical characterizations, and simultaneous contact AFM and SNMM surface imaging are presented.