Hybrid Integration Technology of Laser Source with Laser Diode Arrays on Silicon Optical Waveguide Platform by Flip-chip Bon ding for Silicon Photonics

被引:0
|
作者
Shimizu, Takanori [1 ]
Hatori, Nobuaki [1 ]
Ishizaka, Masashige [1 ]
Urino, Yutaka [1 ]
Yamamoto, Tsuyoshi [1 ]
Nakamura, Takahiro [1 ]
Okano, Makoto [1 ]
Mori, Masahiko [1 ]
Arakawa, Yasuhiko [2 ]
机构
[1] Photon Elect Technol Res Assoc, Inst Photon Elect Convergence Syst Technol PECST, Tsukuba, Ibaraki 3058569, Japan
[2] Univ Tokyo, Inst Ind Sci, Inst Photon Elect Convergence Syst Technol PECST, Meguro Ku, Tokyo 1538505, Japan
关键词
hybrid integration; flip-chip bonding; silicon photonics;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Hybrid integration technology of a laser source ona silicon optical waveguide platform by flip-chip bonding for silicon photonics has been developed. Several types of integrated laser sources were demonstrated, including multi-channel, high-density and high temperature operation.
引用
收藏
页数:4
相关论文
共 50 条
  • [41] CMOS-Compatible Tunable Vernier Ring Laser using Erbium Doped Waveguide on a Silicon Photonics Platform
    Li, Nanxi
    Vermeulen, Diedrik
    Su, Zhan
    Magden, E. Salih
    Ruocco, Alfonso
    Singh, Neetesh
    Notaros, Jelena
    Xin, Ming
    Poulton, Christopher V.
    Timurdogan, Erman
    Baiocco, Christopher
    Watts, Michael R.
    2018 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), 2018,
  • [42] Hybrid III-V/Si DFB laser integration on a 200 mm fully CMOS-compatible silicon photonics platform
    Szelag, B.
    Hassan, K.
    Adelmini, L.
    Ghegin, E.
    Rodriguez, Ph.
    Bensalem, S.
    Nemouchi, F.
    Bria, T.
    Brihoum, M.
    Brianceau, P.
    Vermande, E.
    Pesenti, O.
    Schembri, A.
    Crochemore, R.
    Dominguez, S.
    Roure, M. C.
    Montmayeul, B.
    Sanchez, L.
    Jany, C.
    2017 IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM), 2017,
  • [43] Chip-Level Optical Interconnects Using Polymer Waveguide Integrated With Laser/PD on Silicon
    Shen, Po-Kuan
    Chen, Chin-Ta
    Chen, Ruei-Hung
    Lin, Shu-Shuan
    Chang, Chia-Chi
    Hsiao, Hsu-Liang
    Lan, Hsiao-Chin
    Lee, Yun-Chih
    Lin, Yo-Shen
    Wu, Mount-Learn
    IEEE PHOTONICS TECHNOLOGY LETTERS, 2015, 27 (13) : 1359 - 1362
  • [44] Toward a hybrid integration of a 4-wavelength InGaAsP laser array on the slotted silicon waveguide
    Dai, Xing
    Yu, Hongyan
    Wang, Pengfei
    Chen, Weixi
    Pan, Jiaoqing
    SILICON PHOTONICS: FROM FUNDAMENTAL RESEARCH TO MANUFACTURING, 2018, 10686
  • [45] HYBRID INTEGRATION OF LASER DIODE AND MONOMODE HIGH CONTRAST SLAB WAVE-GUIDE ON SILICON
    JOPPE, JL
    DEKRIJGER, AJT
    NOORDMAN, OFJ
    ELECTRONICS LETTERS, 1991, 27 (02) : 162 - 163
  • [46] Flip-Chip Bonding of VCSELs to Silicon Grating Couplers via SU8 Prisms Fabricated using Laser Ablation
    Kaur, K. S.
    Subramanian, A. Z.
    Verplancke, R.
    Cardile, P.
    Van Kerrebrouck, J.
    Spiga, S.
    Meyer, R.
    Bauwelinck, J.
    Baets, R.
    Van Steenberge, G.
    ECOC 2015 41ST EUROPEAN CONFERENCE ON OPTICAL COMMUNICATION, 2015,
  • [47] Laser-fabricated ball lens optical interface for back side coupling to a silicon photonics sensor chip
    Missinne, Jeroen
    Geudens, Viktor
    Mattelin, Marie-Aline
    Poulopoulos, Giannis
    Zervos, Charalampos
    Avramopoulos, Hercules
    Szaj, Michal
    Van Steenberge, Geert
    2021 ANNUAL CONFERENCE OF THE IEEE PHOTONICS SOCIETY (IPC), 2021,
  • [48] 3D Integrated Laser Attach Technology on 300-mm Monolithic Silicon Photonics Platform
    Bian, Yusheng
    Ramachandran, Koushik
    Peng, Bo
    Hedrick, Brittany
    Donegan, Keith
    Lubguban, Jorge
    Fasano, Benjamin
    Rundquist, Armand
    Pape, Jim
    Sahin, Asli
    Houghton, Thomas
    Nummy, Karen
    Steffes, Jay
    Medina, Louis
    Roy, Subharup Gupta
    Cox, Harry
    Green, Bart
    Dezfulian, Kevin
    Lee, Won Suk
    Stricker, Andy
    Mclean, Kate
    Hu, Shuren
    Sowinski, Zoey
    Meagher, Colleen
    Aboketaf, Abdelsalam
    Rakowski, Michal
    Randall, Mai
    Melville, Ian
    Riggs, Dave
    Jacob, Ajey
    Augur, Rod
    Berger, Daniel
    Yu, Anthony
    Giewont, Ken
    Pellerin, John
    2020 IEEE PHOTONICS CONFERENCE (IPC), 2020,
  • [49] Silicon photonics hybrid wavelength tunable laser diode using curved directional couplers with 145 nm tunable range
    Iwanaga, Kissho
    Tomimura, Yuga
    Kita, Tomohiro
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2024, 63 (03)
  • [50] Multi-Channel and High-Density Hybrid Integrated Light Source on Silicon Optical Waveguide Platform
    Shimizu, Takanori
    Okano, Makoto
    Hatori, Nobuaki
    Ishizaka, Masashige
    Urino, Yutaka
    Yamamoto, Tsuyoshi
    Mori, Masahiko
    Nakamura, Takahiro
    Arakawa, Yasuhiko
    2012 ASIA COMMUNICATIONS AND PHOTONICS CONFERENCE (ACP), 2012,