Quantitative elastic-property measurements at the nanoscale with atomic force acoustic microscopy

被引：23
|
作者：
Hurley, DC [1 ]
Kopycinska-Müller, M [1 ]
Kos, AB [1 ]
Geiss, RH [1 ]
机构：
[1] Natl Inst Stand & Technol, Boulder, CO 80305 USA
来源：
ADVANCED ENGINEERING MATERIALS | 2005年 / 7卷 / 08期
关键词：
D O I：
10.1002/adem.200500039
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
We are developing metrology for rapid, quantitative assessment of elastic properties with nanoscale spatial resolution. Atomic force acoustic microscopy (AFAM) methods enable measurements of modulus at either a single point or as a map of local property variations. The information obtained furthers our understanding of nanopatterned surfaces, thin films, and nanoscale structures.
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页码：713 / 718
页数：6
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