Infrared-Laser-Induced Thermocapillary Deformation and Destabilization of Thin Liquid Films on Moving Substrates

被引:18
|
作者
Wedershoven, H. M. J. M. [1 ]
Berendsen, C. W. J. [1 ]
Zeegers, J. C. H. [1 ]
Darhuber, A. A. [1 ]
机构
[1] Eindhoven Univ Technol, Mesoscop Transport Phenomena Grp, Dept Appl Phys, NL-5600 Eindhoven, Netherlands
来源
PHYSICAL REVIEW APPLIED | 2015年 / 3卷 / 02期
关键词
IMMERSION LITHOGRAPHY; MARANGONI CONVECTION; SURFACE; RUPTURE; DROPLET; DRIVEN; ACTUATION; FLOWS; INSTABILITIES; NUCLEATION;
D O I
10.1103/PhysRevApplied.3.024005
中图分类号
O59 [应用物理学];
学科分类号
摘要
We study the thermocapillary deformation, induced by infrared laser irradiation, of thin liquid films on moving substrates. We develop numerical models for the temperature distribution and film thickness evolution. Steady-state film thickness profiles are measured for different values of substrate speed and laser power. The experimental results compare well with the simulations. In the case of partially wettable substrates, the thin liquid films tend to become unstable. We find that, for certain ranges of the laser power and substrate speed, the film ruptures in a single location and subsequently dewets without the occurrence of residual droplets. Such "clean" dewetting is highly desirable in the context of immersion lithography or solution processing of organic electronic devices.
引用
收藏
页数:13
相关论文
共 50 条
  • [31] Marangoni-induced deformation of evaporating liquid films on composite substrates
    Tatiana Gambaryan-Roisman
    Journal of Engineering Mathematics, 2012, 73 : 39 - 52
  • [33] Laser-induced deformation patterns in thin films and surfaces
    Walgraef, D
    JOURNAL OF ENGINEERING MATERIALS AND TECHNOLOGY-TRANSACTIONS OF THE ASME, 1999, 121 (02): : 182 - 188
  • [34] Thermocapillary instability of irradiated transparent liquid films on absorbing solid substrates
    Saeki, Fumihiro
    Fukui, Shigehisa
    Matsuoka, Hiroshige
    PHYSICS OF FLUIDS, 2013, 25 (06)
  • [35] Evolution of waves in liquid films on moving substrates
    Ivanova, Tsvetelina
    Pino, Fabio
    Scheid, Benoit
    A. Mendez, Miguel
    PHYSICS OF FLUIDS, 2023, 35 (01)
  • [36] A hydrodynamic analysis of thermocapillary convection in evaporating thin liquid films
    Lim, Elaine
    Hung, Yew Mun
    Tan, Boon Thong
    INTERNATIONAL JOURNAL OF HEAT AND MASS TRANSFER, 2017, 108 : 1103 - 1114
  • [37] Competition between thermocapillary and solutocapillary flows in thin liquid films
    Kumar, Darsh
    Panigrahi, Pradipta Kumar
    Bickel, Thomas
    PHYSICS OF FLUIDS, 2025, 37 (02)
  • [38] Time-resolved X-ray absorption spectroscopy of infrared-laser-induced temperature jumps in liquid water
    Gavrila, G.
    Godehusen, K.
    Weniger, C.
    Nibbering, E. T. J.
    Elsaesser, T.
    Eberhardt, W.
    Wernet, P.
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2009, 96 (01): : 11 - 18
  • [39] Enhanced Electrically Induced Micropatterning of Confined Thin Liquid Films: Thermocapillary Role and Its Limitations
    Nazaripoor, Hadi
    Koch, Charles R.
    Sadrzadeh, Mohtada
    INDUSTRIAL & ENGINEERING CHEMISTRY RESEARCH, 2017, 56 (38) : 10678 - 10688
  • [40] Thin Nematic Films on Liquid Substrates
    Deabre, U.
    Richard, C.
    Cazabat, A. M.
    JOURNAL OF PHYSICAL CHEMISTRY B, 2009, 113 (12): : 3647 - 3652