Infrared-Laser-Induced Thermocapillary Deformation and Destabilization of Thin Liquid Films on Moving Substrates

被引:18
|
作者
Wedershoven, H. M. J. M. [1 ]
Berendsen, C. W. J. [1 ]
Zeegers, J. C. H. [1 ]
Darhuber, A. A. [1 ]
机构
[1] Eindhoven Univ Technol, Mesoscop Transport Phenomena Grp, Dept Appl Phys, NL-5600 Eindhoven, Netherlands
来源
PHYSICAL REVIEW APPLIED | 2015年 / 3卷 / 02期
关键词
IMMERSION LITHOGRAPHY; MARANGONI CONVECTION; SURFACE; RUPTURE; DROPLET; DRIVEN; ACTUATION; FLOWS; INSTABILITIES; NUCLEATION;
D O I
10.1103/PhysRevApplied.3.024005
中图分类号
O59 [应用物理学];
学科分类号
摘要
We study the thermocapillary deformation, induced by infrared laser irradiation, of thin liquid films on moving substrates. We develop numerical models for the temperature distribution and film thickness evolution. Steady-state film thickness profiles are measured for different values of substrate speed and laser power. The experimental results compare well with the simulations. In the case of partially wettable substrates, the thin liquid films tend to become unstable. We find that, for certain ranges of the laser power and substrate speed, the film ruptures in a single location and subsequently dewets without the occurrence of residual droplets. Such "clean" dewetting is highly desirable in the context of immersion lithography or solution processing of organic electronic devices.
引用
收藏
页数:13
相关论文
共 50 条