Photoluminescence and electron-spin-resonance studies of defects in amorphous SiO2 films

被引:0
|
作者
Nishikawa, H [1 ]
Fukui, H [1 ]
Watanabe, E [1 ]
Ito, D [1 ]
Seol, KS [1 ]
Ohki, Y [1 ]
机构
[1] Tokyo Metropolitan Univ, Dept Elect Engn, Hachioji, Tokyo 1920397, Japan
关键词
D O I
10.1109/ISEIM.1998.741684
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:59 / 62
页数:4
相关论文
共 50 条
  • [31] ELECTRON-SPIN-RESONANCE AND RAMAN STUDIES ON HYDROGENATED AMORPHOUS SI-SN
    MORIMOTO, A
    KATAOKA, T
    SHIMIZU, T
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1984, 23 (10): : L812 - L814
  • [32] ELECTRON-SPIN-RESONANCE STUDIES ON DOPED HYDROGENATED AMORPHOUS SILICON-CARBON
    CHEN, GH
    MORIMOTO, A
    KUMEDA, M
    SHIMIZU, T
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1985, 89 (02): : K181 - K183
  • [33] ELECTRON-PARAMAGNETIC RESONANCE STUDIES OF DEFECTS IN SILICON-IMPLANTED SIO2
    FUJITA, T
    FUKUI, M
    ITOH, N
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1987, 26 (12): : L1967 - L1969
  • [34] CHARACTERIZATION OF DEFECTS FORMED IN AMORPHOUS SIO2 BY HIGH-ENERGY IONS USING ELECTRON-SPIN RESONANCE AND OPTICAL SPECTROSCOPY
    DOORYHEE, E
    LANGEVIN, Y
    BORG, J
    DURAUD, JP
    BALANZAT, E
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1988, 32 (1-4): : 264 - 267
  • [35] ELECTRON-SPIN-RESONANCE IN HYDROGENATED AMORPHOUS-SILICON
    KUMEDA, M
    SHIMIZU, T
    JAPANESE JOURNAL OF APPLIED PHYSICS, 1980, 19 (04) : L197 - L200
  • [36] PHOTOINDUCED ELECTRON-SPIN-RESONANCE IN AMORPHOUS SI1-XNX-H FILMS
    KUMEDA, M
    YOKOMICHI, H
    SHIMIZU, T
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1984, 23 (07): : L502 - L504
  • [37] ASYMMETRIC ELECTRON-SPIN-RESONANCE SIGNALS IN HYDROGENATED AMORPHOUS-GERMANIUM CARBIDE FILMS
    YU, G
    SONG, ZZ
    CHEN, GH
    PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1992, 172 (01): : K1 - K5
  • [38] ELECTRON-SPIN-RESONANCE OF THE INTRINSIC DEFECTS IN TLSE CRYSTALS
    ABUTALYBOV, GI
    LIKHOLIT, IL
    MASTEROV, VF
    SALAEV, EY
    SHTELMAKH, KF
    AGEKYAN, VF
    JETP LETTERS, 1987, 45 (09) : 554 - 557
  • [39] ELECTRON-SPIN-RESONANCE (ELECTRON-SPIN-RESONANCE AND LESR) STUDIES IN A-SI1-XGEX-H
    FINGER, F
    CARIUS, R
    FUHS, W
    SCHRIMPF, A
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1985, 77-8 : 731 - 734