Preparation of α-alumina-g-polyacrylamide composite abrasive and chemical mechanical polishing behavior

被引：24

作者：

Lei, Hong ^{[1
]}

Lu, Haishen ^{[1
]}

Luo, Jianbin ^{[2
]}

Lu, Xinchun ^{[2
]}

机构：

[1] Shanghai Univ, Res Ctr Nanosci & Nanotechnol, Shanghai 200444, Peoples R China

[2] Tsinghua Univ, State Key Lab Tribol, Beijing 100084, Peoples R China

来源：

THIN SOLID FILMS | 2008年 / 516卷 / 10期

基金：

中国国家自然科学基金;

关键词：

chemical mechanical polishing; glass substrate; alpha-alumina; graft polymerization; composite abrasive;

D O I：

10.1016/j.tsf.2007.11.050

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

a-Alumina-g-polyacrylamide (alpha-Al2O3-g-PAM) composite abrasive was prepared by surface graft polymerization. The composition, structure and morphology of the product were characterized by Fourier transform infrared spectroscopy, X-ray photoelectron spectroscopy, time-of-flight secondary ion mass spectroscopy, and scanning electron microscopy, respectively. Then, the chemical mechanical polishing performances of the composite abrasive on glass substrates were investigated. Atomic force microscopy images show that the average roughness of the polished glass substrate surface can be decreased from 0.74 nm for pure alpha-Al2O3 abrasive to 0.45 nm for alpha-Al2O3-g-PAM abrasive. (c) 2007 Elsevier B.V. All rights reserved.

引用

页码：3005 / 3008

页数：4

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