Preparation of α-alumina-g-polyacrylamide composite abrasive and chemical mechanical polishing behavior

a-Alumina-g-polyacrylamide (alpha-Al2O3-g-PAM) composite abrasive was prepared by surface graft polymerization. The composition, structure and morphology of the product were characterized by Fourier transform infrared spectroscopy, X-ray photoelectron spectroscopy, time-of-flight secondary ion mass spectroscopy, and scanning electron microscopy, respectively. Then, the chemical mechanical polishing performances of the composite abrasive on glass substrates were investigated. Atomic force microscopy images show that the average roughness of the polished glass substrate surface can be decreased from 0.74 nm for pure alpha-Al2O3 abrasive to 0.45 nm for alpha-Al2O3-g-PAM abrasive. (c) 2007 Elsevier B.V. All rights reserved.