Soft x-ray nanobeam formed by an ellipsoidal mirror

被引：19

作者：

Takeo, Yoko ^{[1
,2
]}

Suzuki, Akihiro ^{[3
]}

Motoyama, Hiroto ^{[4
]}

Takei, Yoshinori ^{[1
]}

Kume, Takehiro ^{[5
]}

Matsuzawa, Yusuke ^{[5
]}

Senba, Yasunori ^{[2
]}

Kishimoto, Hikaru ^{[2
]}

Ohashi, Haruhiko ^{[2
]}

Mimura, Hidekazu ^{[1
]}

机构：

[1] Univ Tokyo, Sch Engn, Dept Precis Engn, Bunkyo Ku, 7-3-1 Hongo, Tokyo 1138656, Japan

[2] Japan Synchrotron Radiat Res Inst JASRI, 1-1-1 Koto, Sayo, Hyogo 6795198, Japan

[3] Hokkaido Univ, Res Inst Elect Sci, Kita Ku, N21W10, Sapporo, Hokkaido 0010021, Japan

[4] Univ Tokyo, Sch Sci, Dept Chem, Bunkyo Ku, 7-3-1 Hongo, Tokyo 1130033, Japan

[5] Natsume Opt Corp, Technol Ctr, 1200-29 Kawaji, Nagano 3992431, Japan

来源：

APPLIED PHYSICS LETTERS | 2020年 / 116卷 / 12期

关键词：

PTYCHOGRAPHIC CHARACTERIZATION; MICROSCOPE; LASER; FIELD;

D O I：

10.1063/1.5144932

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Ellipsoidal mirrors are promising optical devices for soft x-ray focusing. A fabrication process consisting of master fabrication and replication has been developed to produce ellipsoidal mirrors with wide apertures of approximately 10mm. In the present study, the focusing performance of an ellipsoidal mirror was evaluated using soft x-rays in the soft x-ray beamline BL25SU-a of SPring-8. The focus sizes were measured at photon energies of 300, 400, and 500eV. A quantitative figure error of the ellipsoidal mirror was also evaluated by analyzing the wavefield of the focused beam retrieved using ptychography. The figure error distributions measured at different photon energies agreed with each other at a root mean square level of 1nm. The developed focusing system can be used for various types of microscopy, allowing the use of a wide range of x-ray energies.

引用

页数：4

共 50 条

[1] Fabrication of a precise ellipsoidal mirror for soft X-ray nanofocusing
Mimura, Hidekazu
Takei, Yoshinori
Kume, Takehiro
Takeo, Yoko
Motoyama, Hiroto
Egawa, Satoru
Matsuzawa, Yusuke
Yamaguchi, Gota
Senba, Yasunori
Kishimoto, Hikaru
Ohashi, Haruhiko
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 2018, 89 (09):
[2] Soft X-ray wavefront sensing at an ellipsoidal mirror shell
Braig, Christoph
Probst, Juergen
Loechel, Heike
Pina, Ladislav
Krist, Thomas
Seifert, Christian
[J]. JOURNAL OF SYNCHROTRON RADIATION, 2024, 31 : 690 - 697
[3] Development of electroforming process for soft x-ray ellipsoidal mirror
Kume, Takehiro
Takei, Yoshinori
Egawa, Satoru
Motoyama, Hiroto
Takeo, Yoko
Yamaguchi, Gota
Mimura, Hidekazu
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 2019, 90 (02):
[4] Development of ellipsoidal focusing mirror for soft X-ray and extreme ultraviolet light
Mimura, Hidekazu
Takei, Yoshinoari
Saito, Takahiro
Kume, Takehiro
Motoyama, Hiroto
Egawa, Satoru
Takeo, Yoko
Higashi, Takahiro
[J]. ADVANCES IN X-RAY/EUV OPTICS AND COMPONENTS X, 2015, 9588
[5] Evaluation of surface figure error profile of ellipsoidal mirror for soft X-ray focusing
Takeo, Yoko
Saito, Takahiro
Mimura, Hidekazu
[J]. ADVANCES IN X-RAY/EUV OPTICS AND COMPONENTS X, 2015, 9588
[6] Development of 120-mm-long ellipsoidal mirror for soft x-ray microscopy
Kume, T.
Hashizume, H.
Hiraguri, K.
Imamura, Y.
Miyashita, H.
Mukoda, T.
Matsuzawa, Y.
Yamaguchi, G.
Takeo, Y.
Shimamura, T.
Senba, Y.
Kishimoto, H.
Ohashi, H.
Mimura, H.
[J]. ADVANCES IN X-RAY/EUV OPTICS AND COMPONENTS XIV, 2019, 11108
[7] Fabrication of an X-Ray Mirror Used in a Soft X-Ray Microscope
Chon, K. S.
Namba, Y.
Yoon, K. H.
[J]. WORLD CONGRESS ON MEDICAL PHYSICS AND BIOMEDICAL ENGINEERING 2006, VOL 14, PTS 1-6, 2007, 14 : 1644 - +
[8] X-ray diffractometer with ellipsoidal multilayer mirror for convergent optics
Schuck, Goetz
Iwata, Akihiko
Konya, Takayuki
[J]. ACTA CRYSTALLOGRAPHICA A-FOUNDATION AND ADVANCES, 2011, 67 : C681 - C681
[9] X-ray microfocusing with off-axis ellipsoidal mirror
Yumoto, Hirokatsu
Koyama, Takahisa
Matsuyama, Satoshi
Kohmura, Yoshiki
Yamauchi, Kazuto
Ishikawa, Tetsuya
Ohashi, Haruhiko
[J]. PROCEEDINGS OF THE 12TH INTERNATIONAL CONFERENCE ON SYNCHROTRON RADIATION INSTRUMENTATION (SRI2015), 2016, 1741
[10] Development of adaptive mirror for wavefront correction of hard X-ray nanobeam
Kimura, Takashi
Handa, Soichiro
Mimura, Hidekazu
Yumoto, Hirokatsu
Yamakawa, Daisuke
Matsuyama, Satoshi
Sano, Yasuhisa
Tamasaku, Kenji
Nishino, Yoshinori
Yabashi, Makina
Ishikawa, Tetsuya
Yamauchi, Kazuto
[J]. ADVANCES IN X-RAY/EUV OPTICS AND COMPONENTS III, 2008, 7077

← 1 2 3 4 5 →