Synthesis of graphene on a polycrystalline Co film by radio-frequency plasma-enhanced chemical vapour deposition

被引：65
|
作者：
Wang, S. M. [1 ,2 ]
Pei, Y. H. [1 ,2 ]
Wang, X. [1 ,2 ]
Wang, H. [1 ,2 ]
Meng, Q. N. [1 ,2 ]
Tian, H. W. [1 ,2 ]
Zheng, X. L. [1 ,2 ]
Zheng, W. T. [1 ,2 ]
Liu, Y. C. [3 ,4 ]
机构：
[1] Jilin Univ, MOE, Key Lab Mobile Mat, Dept Mat Sci, Changchun 130012, Peoples R China
[2] Jilin Univ, State Key Lab Superhard Mat, Changchun 130012, Peoples R China
[3] NE Normal Univ, Minist Educ, Ctr Adv Optoelect Funct Mat Res, Changchun 130024, Peoples R China
[4] NE Normal Univ, Minist Educ, UV Emitting Mat & Technol, Changchun 130024, Peoples R China
来源：
JOURNAL OF PHYSICS D-APPLIED PHYSICS | 2010年 / 43卷 / 45期
基金：
中国国家自然科学基金;
关键词：
LARGE-AREA; CARBON; SUBSTRATE; RAMAN;
D O I：
10.1088/0022-3727/43/45/455402
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Graphene of 1-5 layers was synthesized on a polycrystalline Co film by radio-frequency plasma-enhanced chemical vapour deposition at a relatively low temperature of 800 degrees C for only 40 s in a mixture of gases of CH4/H-2/Ar (1/5/20, with a total gas flow rate of 78 sccm). The obtained graphene is of high quality as revealed by Raman spectroscopy and x-ray photoelectron spectroscopy. It exhibits a high optical transmittance of more than 70% in the wavelength range 500-1200 nm, and a sheet resistivity of 2661 Omega/sq. A possible formation mechanism is proposed. The significant influence of octahedral and tetrahedral lattice interstitial sites in the Co crystallites on the formation of graphene is discussed.
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页数：6
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