user

Interfacial fracture induced by cross-sectional nanoindentation in metal-ceramic thin film structures

被引：37
|
作者：
Elizalde, MR
Sánchez, JM
Martínez-Esnaola, JM
Pantuso, D
Scherban, T
Sun, B
Xu, G
机构：
[1] Ctr Estudios & Invest Tecn Gipuzkoa, CEIT, San Sebastian 20018, Spain
[2] Univ Navarra, TECNUN, Escuela Super Ingenieros, San Sebastian 20080, Spain
[3] Intel Corp, Log Technol Dev, Hillsboro, OR 97124 USA
[4] Intel Corp, Calif Technol & Mfg, Santa Clara, CA 95051 USA
来源：
ACTA MATERIALIA | 2003年 / 51卷 / 14期
关键词：
thin films; interfaces; fracture; adhesion energy; nanoindentation;
D O I：
10.1016/S1359-6454(03)00256-8
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The cross-sectional nanoindentation (CSN) technique is extended to examine the fracture properties of thin film metal-ceramic interfaces. The methodology includes the selection of appropriate indentation parameters to achieve controlled interfacial delamination together with finite element modelling to estimate the contribution of plasticity of the metallic film to the overall interfacial fracture process. The results show good agreement with four-point bending, a method commonly used to measure thin film interfacial toughness, provided that mode mixities are similar. In addition, CSN allows observation of the interfacial crack by scanning electron microscopy and a local measurement of adhesion, with debonded areas in the range of 100-1000 mum(2). The numerical modelling of the test provides an estimate of the intrinsic inter-facial adhesion energy, separating the effects of metal plasticity. (C) 2003 Acta Materialia Inc. Published by Elsevier Science Ltd. All rights reserved.
引用
收藏
页码：4295 / 4305
页数：11
相关论文
共 50 条
  • [1] Cross-sectional nanoindentation for thin film interfacial adhesion characterization
    Elizalde, MR
    Moreno, JMS
    Esnaola, JMM
    Meizoso, AM
    Sevillano, JG
    Maiz, J
    [J]. BOLETIN DE LA SOCIEDAD ESPANOLA DE CERAMICA Y VIDRIO, 2000, 39 (03): : 319 - 322
  • [2] Cross-sectional nanoindentation:: A new technique for thin film interfacial adhesion characterization
    Sánchez, JM
    El-Mansy, S
    Sun, B
    Scherban, T
    Fang, N
    Pantuso, D
    Ford, W
    Elizalde, MR
    Martínez-Esnaola, JM
    Martín-Meizoso, A
    Gil-Sevillano, J
    Fuentes, M
    Maiz, J
    [J]. ACTA MATERIALIA, 1999, 47 (17) : 4405 - 4413
  • [3] Thin films interfacial adhesion characterization by Cross-Sectional Nanoindentation: Application to pad structures
    Gallois-Garreignot, S.
    Chave, F.
    Gonchond, J. P.
    Gautheron, B.
    Fiori, V.
    Nelias, D.
    [J]. 2009 11TH ELECTRONICS PACKAGING TECHNOLOGY CONFERENCE (EPTC 2009), 2009, : 947 - +
  • [4] CROSS-SECTIONAL TEM SPECIMENS FROM METAL-CERAMIC COMPOSITES
    SHINDE, SL
    DEJONGHE, LC
    [J]. JOURNAL OF ELECTRON MICROSCOPY TECHNIQUE, 1986, 3 (03): : 361 - 362
  • [5] Fracture characterization in patterned thin films by cross-sectional nanoindentation
    Ocana, I.
    Molina-Aldareguia, J. M.
    Gonzalez, D.
    Elizalde, M. R.
    Sanchez, J. M.
    Martinez-Esnaola, J. M.
    Sevillano, J. Gil
    Scherban, T.
    Pantuso, D.
    Sun, B.
    Xu, G.
    Miner, B.
    He, J.
    Maiz, J.
    [J]. ACTA MATERIALIA, 2006, 54 (13) : 3453 - 3462
  • [6] Adhesion strength of ductile thin film determined by cross-sectional nanoindentation
    Zhao, Dawei
    Letz, Sebastian
    Jank, Michael
    Maerz, Martin
    [J]. INTERNATIONAL JOURNAL OF MECHANICAL SCIENCES, 2024, 270
  • [7] Characterization of interconnect interfacial adhesion by cross-sectional nanoindentation
    T. Scherban
    D. Pantuso
    B. Sun
    S. El-Mansy
    J. Xu
    M.R. Elizalde
    J.M. Sánchez
    J.M. Martínez-Esnaola
    [J]. International Journal of Fracture, 2003, 120 : 421 - 429
  • [8] Characterization of interconnect interfacial adhesion by cross-sectional nanoindentation
    Scherban, T.
    Pantuso, D.
    Sun, B.
    El-Mansy, S.
    Xu, J.
    Elizalde, M.R.
    Sánchez, J.M.
    Martínez-Esnaola, J.M.
    [J]. International Journal of Fracture, 2003, 120 (1-2) : 421 - 429
  • [9] Characterization of interconnect interfacial adhesion by cross-sectional nanoindentation
    Scherban, T
    Pantuso, D
    Sun, B
    El-Mansy, S
    Xu, J
    Elizalde, MR
    Sánchez, JM
    Martínez-Esnaola, JM
    [J]. INTERNATIONAL JOURNAL OF FRACTURE, 2003, 119 (4-2) : 421 - 429
  • [10] Interfacial structures developed by firing metal-ceramic dental systems
    Darcozi, L.
    Hegedus, Cs.
    Kokenyesi, V.
    Beke, D. L.
    [J]. FUNCTIONAL MATERIALS AND DEVICES, 2006, 517 : 153 - 158
12345