Development and Application of a Multifunctional Nanoindenter: Coupling to Electrical Measurements and Integration In-situ in a Scanning Electron Microscope

Fundamental understanding and quantitative characterization of electron transport mechanisms between two solids brought into mechanical contact require the development of a dedicated multifunctional device. In this study, we report original measurements and analysis based on a nanoindenter coupled with fine electrical measurements in-situ a Scanning Electron Microscope (SEM). After a description of the experimental set-up, we report quantitative results on resistive-nanoindentation on metallic systems with increasing complexity. Starting from a model case (Au single crystal), a procedure is developed and further applied to a complex rheology structure (200 nm Au thin film plastically deformed against an elastic substrate) to demonstrate the quantitative monitoring of contact area. Then a two-phase AgPdCu alloy is used to illustrate the resolution of spatial mapping of both mechanical properties and electrical resistance. Finally, we present our experimental results on natively-oxidized Al single crystal. The resistance evolutions during indentation are discussed in terms on dielectric breakdown and electrochemical processes.