Studies of tip wear processes in tapping mode™ atomic force microscopy

被引:46
|
作者
Su, CM [1 ]
Huang, L [1 ]
Kjoller, K [1 ]
Babcock, K [1 ]
机构
[1] Veeco Metrol Grp, Digital Instruments, Santa Barbara, CA 93117 USA
关键词
D O I
10.1016/S0304-3991(03)00038-X
中图分类号
TH742 [显微镜];
学科分类号
摘要
Tip integrity is crucial to atomic force microscope image quality. Tip wear not only compromises image resolution but also introduces artifacts. However, the factors that govern wearing have not been systematically studied. The results presented here of tip wearing on a rough titanium surface were determined by monitoring changes in tip shape and the evolution of histograms of complex surface curvatures under different control parameters. In contrast with the common assumption that operating at a low set point (the ratio of tapping amplitude to free oscillation amplitude) wears the tip quickly, we observed that a low set point actually minimizes tip wear on a hard surface regardless of the free amplitude. The results can be interpreted qualitatively with theoretical calculations based on momentum exchange at tapping impact. Operating at a low set point allows more robust scanning than with a high set point (tapping near free amplitude), providing a method to slow down tip wear. Another advantage of a low set point is that amplitude error grows faster than with a high set point by nearly an order of magnitude, permitting an increase in scanning speed. (C) 2003 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:135 / 144
页数:10
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