UTSi® CMOS technology for system-on-chip solution

UTSi (Ultra-Thin Silicon) on insulator technology has the potential of integrating digital, analog, RF and RF matching circuitry on a single chip. The technology is based on bulk CMOS VLSI technology with fully integrated passive components. UTSi CMOS technology provides high speed and superior RF performance transistors, high quality passive elements and excellent isolation due to the insulating substrate In this paper, UTSi technology will be briefly reviewed and critical active device performance will be presented. Results show that UTSi CMOS process presents a possible road map for system-on-chip solution for wireless communication systems, especially in low power applications.