A pulsed vacuum arc ion source with a pure boron cathode

被引：3
|
作者：
Gushenets, Vasily I. [1 ]
Oks, Efim M. [1 ,2 ]
Bugaev, Alexey S. [1 ]
机构：
[1] Inst High Current Elect SB RAS, Tomsk 634055, Russia
[2] Tomsk Univ Control Syst & Radioelect, Tomsk 634050, Russia
来源：
PROCEEDINGS OF THE 17TH INTERNATIONAL CONFERENCE ON ION SOURCES | 2018年 / 2011卷
基金：
俄罗斯科学基金会;
关键词：
D O I：
10.1063/1.5053387
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The report presents experimental results on a pulsed vacuum arc ion source with an elemental boron cathode. Boron is a semiconductor having a high specific resistance (similar to 1.8 MOhmxcm) under normal conditions and is difficult to sputter and evaporate [1]. Therefore, for arc ignition with pure boron, it is required to preheat the cathode up to 1000 degrees C. We have designed a high-temperature cathodic unit which uses a special arc triggering technique, provides cathodic arc operation with pure boron, and allows one to decrease the cathode temperature down to 600 degrees C. For an arc current of 100 A with a duration of 100-300 us, the 450-mA beam consists of boron ions in singly and doubly ionized states.
引用
收藏
页数：3
相关论文
共 50 条
  • [41] Two-cathode filtered vacuum arc plasma source
    Aksenov, I. I.
    Aksyonov, D. S.
    Vasilyev, V. V.
    Luchaninov, A. A.
    Reshetnyak, E. N.
    Strel'nitskij, V. E.
    PROBLEMS OF ATOMIC SCIENCE AND TECHNOLOGY, 2008, (01): : 136 - 141
  • [42] Characteristic of a triple-cathode vacuum arc plasma source
    Xiang, W.
    Li, M.
    Chen, L.
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2012, 83 (02):
  • [43] VACUUM-ARC PLASMA SOURCE WITH STEERED CATHODE SPOT
    Aksyonov, D. S.
    Aksenov, I. I.
    Zadneprovsky, Yu. A.
    Loboda, A. M.
    Mel'nikov, S. I.
    Shulayev, V. M.
    PROBLEMS OF ATOMIC SCIENCE AND TECHNOLOGY, 2008, (06): : 210 - 212
  • [44] Vacuum-arc plasma source with extended cylindrical cathode
    Belous, VA
    Leonov, SA
    Khoroshikh, VM
    ISDEIV: XXTH INTERNATIONAL SYMPOSIUM ON DISCHARGES AND ELECTRICAL INSULATION IN VACUUM, PROCEEDINGS, 2002, 20 : 618 - 621
  • [45] Cathode Plasma Expansion at Early Vacuum Arc at Pulsed Plasma Emission
    Kozyrev, A. V.
    Kozhevnikov, V. Yu.
    Kokovin, A. O.
    RUSSIAN PHYSICS JOURNAL, 2024, 67 (05) : 642 - 652
  • [46] Upgraded vacuum arc ion source for metal ion implantation
    Nikolaev, A. G.
    Oks, E. M.
    Savkin, K. P.
    Yushkov, G. Yu.
    Brown, I. G.
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2012, 83 (02):
  • [47] ION FLUX FROM THE CATHODE REGION OF A VACUUM-ARC
    KUTZNER, J
    MILLER, HC
    IEEE TRANSACTIONS ON PLASMA SCIENCE, 1989, 17 (05) : 688 - 694
  • [48] ION FLUX FROM THE CATHODE REGION OF A VACUUM-ARC
    MILLER, HC
    KUTZNER, J
    CONTRIBUTIONS TO PLASMA PHYSICS, 1991, 31 (03) : 261 - 277
  • [49] A CATHODE-TYPE ARC-ION SOURCE
    BEACH, EH
    PARKINSON, WC
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1951, 22 (09): : 697 - 699
  • [50] Simple filtered repetitively pulsed vacuum arc plasma source
    Chekh, Yu.
    Zhirkov, I. S.
    Delplancke-Ogletree, M. P.
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2010, 81 (02):
12345