A pulsed vacuum arc ion source with a pure boron cathode

被引：3
|
作者：
Gushenets, Vasily I. [1 ]
Oks, Efim M. [1 ,2 ]
Bugaev, Alexey S. [1 ]
机构：
[1] Inst High Current Elect SB RAS, Tomsk 634055, Russia
[2] Tomsk Univ Control Syst & Radioelect, Tomsk 634050, Russia
来源：
PROCEEDINGS OF THE 17TH INTERNATIONAL CONFERENCE ON ION SOURCES | 2018年 / 2011卷
基金：
俄罗斯科学基金会;
关键词：
D O I：
10.1063/1.5053387
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The report presents experimental results on a pulsed vacuum arc ion source with an elemental boron cathode. Boron is a semiconductor having a high specific resistance (similar to 1.8 MOhmxcm) under normal conditions and is difficult to sputter and evaporate [1]. Therefore, for arc ignition with pure boron, it is required to preheat the cathode up to 1000 degrees C. We have designed a high-temperature cathodic unit which uses a special arc triggering technique, provides cathodic arc operation with pure boron, and allows one to decrease the cathode temperature down to 600 degrees C. For an arc current of 100 A with a duration of 100-300 us, the 450-mA beam consists of boron ions in singly and doubly ionized states.
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页数：3
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