Analysis of error and development of calibration's method to design precision rotating analyzer ellipsometer

被引：0
|
作者：
Gil, H [1 ]
Park, S [1 ]
Jung, JW [1 ]
Gweon, D [1 ]
机构：
[1] Korea Adv Inst Sci & Technol, Mechatron Lab, Seoul, South Korea
来源：
OPTOMECHATRONIC SYSTEMS | 2001年 / 4190卷
关键词：
rotating analyzer ellipsometer(RAE); error analysis; calibration; numerical analysis; residual function;
D O I：
10.1117/12.417215
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
Numerical calibration is presented as a new calibration method that is complementary to residue calibration using second-order approximation. This method helps the design and manufacture of the rotating-analyzer ellipsometer and contributes to correct derivation of optical data.
引用
收藏
页码：92 / 101
页数：10
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