Characterization of an ArF excimer laser beam from measurements of the Wigner distribution function

被引：6

作者：

Schaefer, Bernd ^{[1
]}

Mann, Klaus ^{[1
]}

机构：

[1] Laser Lab Gottingen, D-37077 Gottingen, Germany

来源：

NEW JOURNAL OF PHYSICS | 2011年 / 13卷

关键词：

PARTIALLY COHERENT-LIGHT; PHASE-SPACE TOMOGRAPHY; WAVE-FRONT SENSOR; PARAMETERS;

D O I：

10.1088/1367-2630/13/4/043013

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

An ArF excimer laser beam at a wavelength of 193 nm has been characterized by a quantitative determination of the Wigner distribution function. The setup, comprising a spherical lens, a rotating cylindrical lens and a moveable ultraviolet-sensitive CCD detector, enabled the mapping of the entire four-dimensional phase space within less than 20 min. Experiments yielded complete information about second-order moment-based parameters, spatial coherence, wavefront, beam profiles, as well as beam propagation and local distributions of radiant intensities.

引用

页数：10

共 50 条

[31] Research on the beam quality of diode lasers based on Wigner distribution function
Zhang, Xiaoning
Cao, Yinhua
Qiu, Yuntao
Li, Jing
Wei, Yafei
Zhao, Fan
Qin, Wenbin
Liu, Youqiang
THIRD INTERNATIONAL CONFERENCE ON PHOTONICS AND OPTICAL ENGINEERING, 2019, 11052
[32] Wigner distribution function of a Lorentz–Gauss vortex beam: alternative approach
A. Torre
Applied Physics B, 2016, 122
[33] DIFFRACTION MEASUREMENTS OF LASER BEAM INTENSITY DISTRIBUTION
KALESTYNSKI, A
ZARDECKI, A
PHYSICS LETTERS A, 1969, A 30 (05) : 306 - +
[34] Irradiance-moments characterization of off-axis Gaussian beam combinations by means of the Wigner distribution function
Li, BZ
Lü, BD
OPTIK, 2002, 113 (11): : 469 - 475
[35] Measuring laser beam parameters, phase and spatial coherence using the Wigner distribution
Eppich, B
Johansson, S
Laabs, H
Weber, H
LASER RESONATORS III, 2000, 3930 : 76 - 86
[36] Characterization of calcium phosphate coatings doped with Mg, deposited by pulsed laser deposition technique using ArF excimer laser
Mroz, W.
Jedynski, M.
Prokopiuk, A.
Slosarczyk, A.
Paszkiewicz, Z.
MICRON, 2009, 40 (01) : 140 - 142
[37] Wigner distribution function of a Lorentz-Gauss vortex beam: alternative approach
Torre, A.
APPLIED PHYSICS B-LASERS AND OPTICS, 2016, 122 (03):
[38] Electrical characterization of silicon dioxide thin film prepared by ArF excimer laser chemical vapor deposition from silicon tetraacetate
Maruyama, A
Nakata, K
Yukimura, K
Yoshikado, S
Maruyama, T
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1997, 36 (2A): : L150 - L153
[39] CHARACTERIZATION OF ARF-EXCIMER LASER-TISSUE PROCESSING USING PHOTOACOUSTIC DEPTH PROFILING (PADP)
LUBATSCHOWSKI, H
OLMES, A
KERMANI, O
ERTMER, W
INVESTIGATIVE OPHTHALMOLOGY & VISUAL SCIENCE, 1994, 35 (04) : 2016 - 2016
[40] Excimer laser beam/ITO interaction: from laser processing to surface reaction
Legeay, G.
Castel, X.
Benzerga, R.
Pinel, J.
PHYSICA STATUS SOLIDI C - CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 5, NO 10, 2008, 5 (10): : 3248 - 3254

← 1 2 3 4 5 →