Characterization of an ArF excimer laser beam from measurements of the Wigner distribution function

被引：6

作者：

Schaefer, Bernd ^{[1
]}

Mann, Klaus ^{[1
]}

机构：

[1] Laser Lab Gottingen, D-37077 Gottingen, Germany

来源：

NEW JOURNAL OF PHYSICS | 2011年 / 13卷

关键词：

PARTIALLY COHERENT-LIGHT; PHASE-SPACE TOMOGRAPHY; WAVE-FRONT SENSOR; PARAMETERS;

D O I：

10.1088/1367-2630/13/4/043013

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

An ArF excimer laser beam at a wavelength of 193 nm has been characterized by a quantitative determination of the Wigner distribution function. The setup, comprising a spherical lens, a rotating cylindrical lens and a moveable ultraviolet-sensitive CCD detector, enabled the mapping of the entire four-dimensional phase space within less than 20 min. Experiments yielded complete information about second-order moment-based parameters, spatial coherence, wavefront, beam profiles, as well as beam propagation and local distributions of radiant intensities.

引用

页数：10

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