Characterization of an ArF excimer laser beam from measurements of the Wigner distribution function

被引：6
|
作者：
Schaefer, Bernd [1 ]
Mann, Klaus [1 ]
机构：
[1] Laser Lab Gottingen, D-37077 Gottingen, Germany
来源：
NEW JOURNAL OF PHYSICS | 2011年 / 13卷
关键词：
PARTIALLY COHERENT-LIGHT; PHASE-SPACE TOMOGRAPHY; WAVE-FRONT SENSOR; PARAMETERS;
D O I：
10.1088/1367-2630/13/4/043013
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
An ArF excimer laser beam at a wavelength of 193 nm has been characterized by a quantitative determination of the Wigner distribution function. The setup, comprising a spherical lens, a rotating cylindrical lens and a moveable ultraviolet-sensitive CCD detector, enabled the mapping of the entire four-dimensional phase space within less than 20 min. Experiments yielded complete information about second-order moment-based parameters, spatial coherence, wavefront, beam profiles, as well as beam propagation and local distributions of radiant intensities.
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页数：10
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