Recent improvements in the integration of field emitters into scanning probe microscopy sensors

被引：4

作者：

Beuer, S. ^{[1
]}

Rommel, M. ^{[1
]}

Petersen, S. ^{[1
]}

Amon, B. ^{[1
]}

Sulzbach, Th. ^{[2
]}

Engl, W. ^{[2
]}

Bauer, A. J. ^{[1
]}

Ryssel, H. ^{[1
,3
]}

机构：

[1] Fraunhofer Inst Integrated Syst & Device Technol, IISB, D-91058 Erlangen, Germany

[2] Nano World Serv GmbH, D-91058 Erlangen, Germany

[3] Univ Erlangen Nurnberg, Chair Electron Devices, D-91058 Erlangen, Germany

来源：

MICROELECTRONIC ENGINEERING | 2008年 / 85卷 / 5-6期

关键词：

integrated field emitter; SPM sensors; EBID carbon;

D O I：

10.1016/j.mee.2008.01.048

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Recent improvements in the fabrication of integrated field emitters with a control electrode into scanning probe microscopy sensors are presented and discussed. Compared to earlier work the precursor material for the electron beam induced deposition of the emitter was changed from a Pt precursor ((CH3C5H4)Pt(CH3)(3)) to a C precursor (C14H10) which leads to a higher process yield and an improved process stability. The change of the material for the control electrode from Pt to Cr results in better compatibility to standard semiconductor processing. The field emitter devices were fabricated by focused charged particle beam processing revealing emission currents of 0.8 mu A/tip for gate voltages of about 65 V. Possible reasons for the high turn-on voltages V-to were investigated by high resolution transmission electron microscopy combined with EDX analyses and approaches for reducing V-to are presented. (C) 2008 Elsevier B.V. All rights reserved.

引用

页码：1135 / 1138

页数：4

共 50 条

[21] Nanofabrication of sensors on cantilever probe tips for scanning multiprobe microscopy
Luo, K
Shi, Z
Lai, J
Majumdar, A
APPLIED PHYSICS LETTERS, 1996, 68 (03) : 325 - 327
[22] Metrology in scanning probe microscopy with atomic force microscopy and near-field scanning optical microscopy
zurMuhlen, E
Munoz, M
Gehring, S
Reineke, F
EUROPEAN JOURNAL OF CELL BIOLOGY, 1997, 74 : 72 - 72
[23] Erratum: Recent advances in submolecular resolution with scanning probe microscopy
Leo Gross
Nature Chemistry, 2011, 3 (6) : 493 - 493
[24] Scanning microscopy technologies: Scanning electron microscopy and scanning probe microscopy
Nessler, R
SCANNING, 1999, 21 (02) : 137 - 137
[25] THERMAL SENSORS FOR INVESTIGATION OF HEAT-TRANSFER IN SCANNING PROBE MICROSCOPY
XU, JB
LAUGER, K
DRANSFELD, K
WILSON, IH
REVIEW OF SCIENTIFIC INSTRUMENTS, 1994, 65 (07): : 2262 - 2266
[26] Calibration of the oscillation amplitude of electrically excited scanning probe microscopy sensors
Dagdeviren, Omur E.
Miyahara, Yoichi
Mascaro, Aaron
Grutter, Peter
REVIEW OF SCIENTIFIC INSTRUMENTS, 2019, 90 (01):
[27] Interface circuits for quartz crystal sensors in scanning probe microscopy applications
Jersch, Johann
Maletzky, Tobias
Fuchs, Harald
REVIEW OF SCIENTIFIC INSTRUMENTS, 2006, 77 (08):
[28] Integration of Magnetoresistive Sensors With Atomic Force Microscopy Cantilevers for Scanning Magnetoresistance Microscopy Applications
Costa, Margaret
Gaspar, Joao
Ferreira, Ricardo
Paz, Elvira
Fonseca, Helder
Martins, Marco
Cardoso, Susana
Freitas, Paulo P.
IEEE TRANSACTIONS ON MAGNETICS, 2015, 51 (11)
[29] Integration of Magnetoresistive Sensors with Atomic Force Microscopy Cantilevers for Scanning Magnetoresistance Microscopy Applications
Costa, M.
Gaspar, J.
Ferreira, R.
Paz, E.
Fonseca, H.
Martins, M.
Cardoso, S.
Freitas, P.
2015 IEEE MAGNETICS CONFERENCE (INTERMAG), 2015,
[30] Scanning probe microscopy
Graduate School of Engineering, Osaka University, Yamada-Oka 2-1, Suita 565-0871, Japan
Shinku, 2008, 12 (769-770)

← 1 2 3 4 5 →