2-Bit MEMS distributed X-band phase shifters

被引：47
|
作者：
Hayden, JS [1 ]
Rebeiz, GM [1 ]
机构：
[1] Univ Michigan, Dept Elect Engn & Comp Sci, Radiat Lab, Ann Arbor, MI 49109 USA
来源：
IEEE MICROWAVE AND GUIDED WAVE LETTERS | 2000年 / 10卷 / 12期
关键词：
distributed circuit; MEMS; phase shifter;
D O I：
10.1109/75.895096
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A wideband distributed coplanar-waveguide (CPW) phase shifter has been developed for X-band operation, The design is based on the distributed MEMS transmission Line (DMTL) loaded with MEMS bridges and MIM capacitors. A 2-bit distributed phase shifter was fabricated on a 500-mum quartz substrate, and achieved a true-time delay operation from 1 to 20 GHz with a reflection coefficient less than -11 dB from 2 to 20 GHz and above. Insertion loss is dominated by a low-Q MIM capacitor (14 at 10 GHz) and the effect of this Q is shown. Increasing the MIM capacitor Q will result in an excellent 2-bit phase shifter with wideband performance at X-band frequencies.
引用
收藏
页码：540 / 542
页数：3
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