One and two-bit low-loss cascadable MEMS distributed X-band phase shifters

被引：0
|
作者：
Hayden, JS [1 ]
Rebeiz, GM [1 ]
机构：
[1] Univ Michigan, Dept Elect Engn & Comp Sci, Radiat Lab, Ann Arbor, MI 48109 USA
来源：
2000 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST, VOLS 1-3 | 2000年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A wideband distributed coplanar waveguide (CPW) phase shifter has been developed for X-band operation. The design is based on the distributed MEMS transmission line (DMTL) loaded with high capacitance-ratio varactors. The varactors are fabricated using a series combination of MEMS bridges and fixed-value MIM capacitors. A high-capacitance ratio varactor (1.5 to 2.5) results in a large loading on the CPW line and therefore a large phase shift. A distributed phase shifter was fabricated on a 500 mum quartz substrate, and achieved a true-time delay operation hom 1-10 GHz with a measured reflection coefficient less than -15 dB, and 180 degrees /dB of insertion loss at 8-10 GHz. This design can be cascaded to result in a a-bit, 0/90/180/270 degrees phase shifter with linear phase shifts up to 15 GHz.
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页码：161 / 164
页数：4
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