PMSE 556-Patterning on individual colloidal particles using the particle lithography process

被引：0
|
作者：
Kamat, Prashant [1 ]
Robel, Istvan [1 ]
机构：
[1] Univ Notre Dame, Dept Chem, Radiat Lab, Notre Dame, IN 46556 USA
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 2006年 / 232卷
关键词：
D O I：
暂无
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
94-PMSE
引用
收藏
页码：498 / 498
页数：1
相关论文
共 50 条
  • [31] Process induced defects in sub-0.15-μm device patterning using 193 nm lithography
    Okoroanyanwu, U
    Pike, C
    Levinson, HJ
    METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XIV, 2000, 3998 : 277 - 283
  • [32] Metal Patterning Process on Rigid and Flexible Substrates Using Nanoimprint Lithography and Resist Pattern Transfer Technique
    Jung, Ho Yong
    Han, Kang-Soo
    Lee, Jong Hwa
    Lee, Heon
    JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2009, 9 (07) : 4338 - 4341
  • [33] Aging process of the bond between colloidal particles measured using laser tweezers
    Meng, Binghuan
    Wu, Jianguang
    Li, Yinmei
    Lou, Liren
    COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS, 2008, 322 (1-3) : 253 - 255
  • [34] AC electrophoretic mobility of individual microscale colloidal particles measured using holographic video microscopy
    Ikeda, Toyokazu
    Eitoku, Haruka
    Kimura, Yasuyuki
    APPLIED PHYSICS LETTERS, 2019, 114 (15)
  • [35] Direct integration of subwavelength structure on a GaAs solar cell by using colloidal lithography and dry etching process
    Kim, Dae-Seon
    Eo, Sung-Hwa
    Jang, Jae-Hyung
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2013, 31 (03):
  • [36] Bio-Lithography: A Novel Process for Modification and Patterning of Supported Lipid Bilayers using Lipopolysaccharide, a Biological Amphiphile
    Adams, Peter G.
    Swingle, Kirstie L.
    Paxton, Walter F.
    Nogan, John J.
    Lamoureux, Loreen
    Firestone, Millicent A.
    Mukundan, Harshini
    Montano, Gabriel A.
    BIOPHYSICAL JOURNAL, 2015, 108 (02) : 487A - 487A
  • [37] Overlay-Aware Detailed Routing for Self-Aligned Double Patterning Lithography Using the Cut Process
    Liu, Iou-Jen
    Fang, Shao-Yun
    Chang, Yao-Wen
    2014 51ST ACM/EDAC/IEEE DESIGN AUTOMATION CONFERENCE (DAC), 2014,
  • [38] Overlay-Aware Detailed Routing for Self-Aligned Double Patterning Lithography Using the Cut Process
    Liu, Iou-Jen
    Fang, Shao-Yun
    Chang, Yao-Wen
    IEEE TRANSACTIONS ON COMPUTER-AIDED DESIGN OF INTEGRATED CIRCUITS AND SYSTEMS, 2016, 35 (09) : 1519 - 1531
  • [39] CD Uniformity improvement for Double-Patterning Lithography (Litho-Litho-Etch) Using Freezing Process
    Sugimachi, Hisanori
    Kosugi, Hitoshi
    Shibata, Tsuyoshi
    Kitano, Junichi
    Fujiwara, Koichi
    Itou, Kouji
    Mita, Michihiro
    Soyano, Akimasa
    Kusumoto, Shiro
    Shima, Motoyuki
    Yamaguchi, Yoshikazu
    ADVANCES IN RESIST MATERIALS AND PROCESSING TECHNOLOGY XXVI, 2009, 7273
  • [40] Colloidal Film Formation Process Using Electrophoresis of Charged Particles in Liquid and Electrode Reaction
    Uchikoshi T.
    Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy, 2023, 70 (10): : 407 - 415
12345