Pyrolytic laser CVD of boron nitride and molybdenum

被引：5
|
作者：
Duty, C [1 ]
Johnson, R [1 ]
Bondi, S [1 ]
Lackey, WJ [1 ]
机构：
[1] Georgia Inst Technol, Woodruff Sch Mech Engn, Atlanta, GA 30332 USA
来源：
CHEMICAL VAPOR DEPOSITION | 2003年 / 9卷 / 06期
关键词：
D O I：
10.1002/cvde.200304159
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：298 / 301
页数：4
相关论文
共 50 条
  • [41] Chemical vapor deposition of pyrolytic boron nitride from borazine
    Demin, VN
    Asanov, IP
    Akkerman, ZL
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 2000, 18 (01): : 94 - 98
  • [42] Optical properties and structure of pyrolytic boron nitride for THz applications
    Naftaly, Mira
    Leist, Jon
    Fletcher, John R.
    OPTICAL MATERIALS EXPRESS, 2013, 3 (02): : 260 - 269
  • [43] HIGH-TEMPERATURE OXIDATION OF PYROLYTIC BORON-NITRIDE
    ALEXEEV, AF
    LAVRENKO, VA
    NESHPOR, VS
    FRANTSEVICH, IN
    DOKLADY AKADEMII NAUK SSSR, 1978, 238 (02): : 370 - 373
  • [44] HIGH-TEMPERATURE CAPACITORS FROM PYROLYTIC BORON NITRIDE
    STAPLETO.RE
    LINDBERG, RA
    SPACE AERONAUTICS, 1968, 50 (07): : 75 - &
  • [45] Chemical vapor deposition of pyrolytic boron nitride from borazine
    Demin, VN
    Basov, AI
    Akkerman, ZL
    INORGANIC MATERIALS, 1998, 34 (08) : 823 - 826
  • [46] Investigation of partial oxidation of copper deposited on pyrolytic boron nitride
    Telgheder, FW
    Urban, J
    PHYSICAL CHEMISTRY CHEMICAL PHYSICS, 1999, 1 (18) : 4479 - 4483
  • [47] CHARACTERIZATION OF PYROLYTIC BORON-NITRIDE AS A DIFFUSION SOURCE FOR SILICON
    NEVIN, JH
    HELMIG, MT
    AGUIAR, S
    SOLID-STATE ELECTRONICS, 1978, 21 (07) : 987 - 988
  • [48] Formation of Boron-Based Films and Boron Nitride Layers by CVD of a Boron Ester
    Sachdev, Hermann
    Mueller, Frank
    Huefner, Stefan
    ANGEWANDTE CHEMIE-INTERNATIONAL EDITION, 2011, 50 (16) : 3701 - 3705
  • [49] Infrared optical properties of semitransparent pyrolytic boron nitride (pBN)
    Manara, J
    Caps, R
    Ebert, HP
    Hemberger, F
    Fricke, J
    Seidl, A
    HIGH TEMPERATURES-HIGH PRESSURES, 2002, 34 (01) : 65 - 72
  • [50] MICROSTRIP TRANSMISSION-LINES ON PYROLYTIC BORON-NITRIDE
    KROWNE, CM
    ELECTRONICS LETTERS, 1976, 12 (24) : 642 - 643
12345