Chemical vapor deposition of pyrolytic boron nitride from borazine

Pyrolytic boron nitride coatings were prepared by chemical vapor deposition in the B3N3H6-N-2 system at temperatures from 1300 to 1800 degrees C and total pressures in the system from 10(2) to 10(3) Pa. The deposition rate was found to be diffusion-controlled The structure of the resultant materials was characterized by IR spectroscopy. The CVD of pyrolytic boron nitride from borazine allows one to reduce the deposition temperature in comparison with conventional systems and to obtain dense, stoichiometric coatings containing a large amount of the hexagonal phase at deposition rates high enough for practical application.